Electronic Specialty Gases: CAS-Listed Fluorinated Gases We Can Source and Document

Wed, 23 Sep 2026 · RIBOLUO CHEMICALS (ZHEJIANG) CO., LTD.

An electronic specialty gas is bought by substance and grade, not by brand: a CAS number fixes the substance, the specification sheet fixes the impurity limits, and a certified pressure container gets it to your line. RIBOLUO CHEMICALS (ZHEJIANG) CO., LTD. is a distribution platform — we source from qualified producers, consolidate the order and hand over the document set. We are not a manufacturer.

Which gases are on this page?

Four fluorinated substances, each listed in our business scope. Each row is one defined substance with one CAS number — not a blend, not a family.

Designation note. Designation numbers travel by habit, not by rule. Tetrafluoromethane is R-14; R-41 is a different substance — fluoromethane, CH₃F, CAS 593-53-3 — so a request written “R41” cannot be filled as tetrafluoromethane. When a designation and a name sit in the same line of an email, check both against the CAS before the enquiry becomes an order.

What makes a fluorocarbon an “electronic specialty gas”?

The formula is not the difference — the specification is. The same molecule sold as an industrial or refrigerant gas and the same molecule sold for a fab differ in the impurity limits they are held to, the analysis run against them, and the container service they are packed in.

SEMI C3, Specification for Gases, shows how such limits are written: content limits in mole/mole, the assay for a major component as a minimum permissible limit and each impurity as a maximum. A gas beating the minimum assay is not “better” than the specification — it is the same product.

• A grade is a list of limits, not one number. “Purity” alone does not say what is excluded; the limits that matter are those on the specification sheet, typically trace oxygen, moisture, carbon monoxide and dioxide, other halocarbons, and metals where the process is sensitive.
• The same CAS is bought at different grades — so the grade belongs in the purchase order, not in an assumption drawn from the product name.

Packages: what you are buying when you order a cylinder

A specialty gas order is two transactions at once — you buy the gas, and you take custody of a certified pressure container that has to come back.

Four points that decide whether the shipment works:

1. The valve outlet is part of the product. A cylinder arriving with a fitting your gas panel cannot take is a delay, not a delivery. Name the outlet connection you need (CGA, DISS, JIS, DIN or BS, by number).
2. Fill is by mass, not volume. A liquefied gas is filled to a mass ratio that keeps the container from becoming liquid-full at the temperature the transport rules assume. A pressure reading says nothing about whether the mass is inside the limit; net weight (gross minus tare) is the verifiable quantity.
3. Containers travel protected. The industry guide for this category (EIGA Doc 199 / AIGA 018) expects containers certified and periodically tested to national standards, valve protection fitted in transit, handling by trained personnel only, the SDS on hand and an emergency response plan at the receiving site.
4. An empty cylinder is not empty. Returnable containers normally travel under positive residual pressure so air and moisture cannot enter the shell. Ask what residual pressure is required on the return leg and write it into the contract.

Documents: what should travel with the gas

As a distributor we pass through the producer’s documents. We do not re-issue another laboratory’s COA, and we do not restate a producer’s limit as our own measurement. Every figure we send comes from a document you can read too, with the issuing entity named on it.

Shipments that leave China are outside our own scope: our sister company HARMONY TECHNOLOGY (ZHEJIANG) CO., LTD. handles international trading and export markets (hm-chem.com).

How to write the grade on a purchase order

A workable grade line has five parts, and it can be short:

1. Substance + CAS — not the trade name alone.
2. Grade basis — “conforming to the producer’s specification sheet [reference]” is normally the strongest route; alternatively name the framework (for example a SEMI C3-style specification).
3. The critical impurities for your process, each with a maximum limit and test method.
4. Test level — whether each cylinder, bundle or lot is analysed, and whether the batch COA must be supplied before shipment.
5. Container requalification, and whether the gas needs a documented retest window in your store.

If a limit cannot be evidenced, do not write it: a number nobody will stand behind becomes the acceptance criterion. Where you have no specification of your own, we will ask the producer for theirs and send it before you commit.

How to raise an enquiry

Send these and the quotation can be specific rather than indicative:

• Substance and CAS number (and the designation, if the request arrived in that form).
• Grade basis, and the impurities you care about.
• Package format, cylinder count, and the valve outlet connection you need.
• Returnable or one-way container, and whether the return leg must be costed.
• Destination port or receiving site, and whether the last leg involves inland dangerous-goods delivery.
• Documents required before shipment (specification sheet, COA, SDS language, certificates).
• Incoterm and quantity. MOQ is per substance and per package — it is quoted, not assumed.

All shipments move as dangerous goods under the rules in force for the route. The classification we declare is the one in the producer’s SDS; it is not adjusted to make a booking easier, and a request to route around a dangerous-goods requirement cannot be accepted.

FAQ

Can I buy a single cylinder to qualify a supplier? Often yes — the constraint is the producer’s minimum and the package you need, not our willingness. A qualification cylinder ships with the same document set as a full order, so the test is meaningful.

Is the CAS number enough to order? No. The CAS fixes the substance; it says nothing about grade, container, valve outlet or documentation. Those four are what an order actually specifies.

These substances also appear on refrigerant lists. Does that matter? It can matter at the destination rather than at the container: R-14, R-116, R-C318 and R-1216 all carry ASHRAE designations, and some end uses fall under national F-gas or ozone-depleting-substance rules. That question belongs with your compliance team. The refrigerant side of the same substances — GWP (AR4) basis, ASHRAE class and where they are regulated — is set out in Low-GWP refrigerants: the grades we can source.

Do you hold stock? We are a distribution platform and supply to order, so availability is per substance and per package, confirmed in writing at quotation.

What we can provide

If you need an electronic specialty gas sourced from a qualified producer, packed to your valve outlet, and delivered with a document set that stands up at goods-in, send us the substance, the CAS number, the grade basis and the destination — we will come back with the package, the documents and the paper trail for that order.

Related guides

• Low-GWP refrigerants: the grades we can source
• Perfluoropolyether fluids: what decides a grade
• Reading a CAS-level specification sheet
• Packing formats by volume: cylinders to ISO tanks
• Distributor vs producer: what changes on the documents

Sources

• PubChem — Carbon tetrafluoride, CAS 75-73-0: https://pubchem.ncbi.nlm.nih.gov/compound/6393
• PubChem — Hexafluoroethane, CAS 76-16-4 (CID 6431): https://pubchem.ncbi.nlm.nih.gov/compound/6431
• PubChem — Octafluorocyclobutane, CAS 115-25-3: https://pubchem.ncbi.nlm.nih.gov/compound/8263
• NIST WebBook — Hexafluoropropene, CAS 116-15-4 (lists UN 1858, R 1216): https://webbook.nist.gov/cgi/cbook.cgi?ID=116-15-4
• NOAA CAMEO Chemicals — Hexafluoropropylene, CAS 116-15-4, UN/NA 1858: https://cameochemicals.noaa.gov/chemical/843
• ASHRAE — Refrigerant designations (R-14, R-116, R-C318 and R-41/CH₃F are distinct entries): https://www.ashrae.org/technical-resources/standards-and-guidelines/ashrae-refrigerant-designations
• Linde — SDS, tetrafluoromethane (R 14), UN 1982 (PDF): https://produkte.linde-gas.at/sdb_konform/R14_10021832EN.pdf
• Linde — SDS, octafluorocyclobutane (RC 318), UN 1976 (PDF): https://produkte.linde-gas.at/sdb_konform/RC318_10021758EN.pdf
• Airgas / Halocarbon — SDS, R-116 hexafluoroethane, UN 2193 (PDF): https://www.airgas.com/msds/001053.pdf
• EIGA Doc 199 / AIGA 018 — Safe handling of electronic specialty gases (PDF): https://www.eiga.eu/uploads/documents/DOC199.pdf
• SEMI C3 — Specification for Gases (limits in mole/mole): https://store-us.semi.org/products/c00300-semi-c3-specification-for-gases
• SEMI — Opportunities in Electronic Specialty Gases (packages: small cylinders, tonner/Y packages, tube trailers): https://www.semi.org/en/blogs/technology-trends/opportunities-in-electronic-specialty-gases
• SK Specialty — specialty gas cylinder types and valve connections (47 L, bundle, Y-cylinder, ISO container): https://www.skspecialty.com/new/eng/html/products/sih4.asp
• State Council of the PRC — Regulations on the Safety Administration of Dangerous Chemicals (Decree No. 591): https://www.gov.cn/zhengce/2011-03/11/content_2602576.htm

Prepared by RIBOLUO CHEMICALS (ZHEJIANG) CO., LTD., a member of Hangrui Group — a chemical distribution platform (sourcing, consolidation and documentation), not a manufacturer. Purity, impurity and moisture limits are those stated in the supplier’s specification sheet and certificate of analysis for the batch shipped; designations, UN numbers and classes quoted here are published identifiers, and the classification of a given shipment is the one declared in that product’s SDS.